Laser processing apparatus

A laser processing apparatus includes a laser source which generates a laser beam; a scanner unit disposed in an optical path of the laser beam from the laser source and which adjusts the optical path of the laser beam from the laser source in a first direction or in a second direction different fro...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Lee, Hae Sook, Chung, Kyung Hoon, Aslanov, Emil, Ryu, Je Kil, Han, Gyoo Wan
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A laser processing apparatus includes a laser source which generates a laser beam; a scanner unit disposed in an optical path of the laser beam from the laser source and which adjusts the optical path of the laser beam from the laser source in a first direction or in a second direction different from the first direction; and a reflector unit disposed in an optical path of the laser beam adjusted by the scanner unit and which reflects the laser beam adjusted by the scanner unit, where the reflector unit includes a first sub-reflector unit which shifts an optical path of the laser adjusted by the scanner unit in the first direction, and a second sub-reflector unit which shifts an optical path of the laser beam adjusted by the scanner unit in a third direction opposite to the first direction.