Semiconductor device structure with barrier layer

A semiconductor device structure is provided. The semiconductor device structure includes a dielectric structure over the substrate. The semiconductor device structure includes a contact structure passing through the dielectric structure. The contact structure includes a contact layer, a first barri...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Jangjian, Shiu-Ko, Wu, Chia-Yang, Wang, Ting-Chun, Yu, Yung-Si
Format: Patent
Sprache:eng
Schlagworte:
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