High refractive index imprint compositions and materials and processes for making the same

Embodiments of the present disclosure generally relate to imprint compositions and materials and related processes useful for nanoimprint lithography (NIL). In one or more embodiments, an imprint composition contains one or more types of nanoparticles, one or more surface ligands, one or more solven...

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Bibliographische Detailangaben
Hauptverfasser: McMackin, Ian Matthew, Ganapathiappan, Sivapackia, Hourani, Rami, Luo, Yingdong, Joshi, Amita, Godet, Ludovic
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Embodiments of the present disclosure generally relate to imprint compositions and materials and related processes useful for nanoimprint lithography (NIL). In one or more embodiments, an imprint composition contains one or more types of nanoparticles, one or more surface ligands, one or more solvents, one or more additives, and one or more acrylates.