Semiconductor device and manufacturing method thereof

A semiconductor device includes a first chip and a second chip bonded to the first chip. The first chip includes: a substrate; a logic circuit disposed on the substrate; and a plurality of first dummy pads that are disposed above the logic circuit, are disposed on a first bonding surface where the f...

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Bibliographische Detailangaben
1. Verfasser: Arai, Shinya
Format: Patent
Sprache:eng
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