Plasma apparatus and methods for processing feed material utilizing an upstream swirl module and composite gas flows

Disclosed herein are systems, methods, and devices processing feed material utilizing an upstream swirl module and composite gas flows. Some embodiments are directed to a microwave plasma apparatus for processing a material, comprising: a first flow module, a second flow module, and a liner.

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Bibliographische Detailangaben
Hauptverfasser: Matys, Pawel, Resnick, Michael, Kozlowski, Michael C
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Disclosed herein are systems, methods, and devices processing feed material utilizing an upstream swirl module and composite gas flows. Some embodiments are directed to a microwave plasma apparatus for processing a material, comprising: a first flow module, a second flow module, and a liner.