Silicon carbide semiconductor device and method of manufacturing silicon carbide semiconductor device

Silicon carbide semiconductor device and method of manufacturing silicon carbide semiconductor device

A voltage withstanding structure disposed in an edge termination region is a spatial modulation junction termination extension (JTE) structure formed by a combination of a JTE structure and a field limiting ring (FLR) structure. All FLRs configuring the FLR structure are surrounded by an innermost o...

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1. Verfasser: Kinoshita, Akimasa
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator Kinoshita, Akimasa
description A voltage withstanding structure disposed in an edge termination region is a spatial modulation junction termination extension (JTE) structure formed by a combination of a JTE structure and a field limiting ring (FLR) structure. All FLRs configuring the FLR structure are surrounded by an innermost one of p−−-type regions configuring the JTE structure. An innermost one of the FLRs is disposed overlapping a p+-type extension and the innermost one of the p−−-type regions, at a position overlapping a border between the p+-type extension and the innermost one of the p−−-type regions. The FLRs are formed concurrently with p++-type contact regions in an active region and have an impurity concentration substantially equal to an impurity concentration of the p++-type contact regions. An n+-type channel stopper region is formed concurrently with n+-type source regions in the active region and has an impurity concentration substantially equal to an impurity concentration the n+-type source regions.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Silicon carbide semiconductor device and method of manufacturing silicon carbide semiconductor device
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