Automatic system calibration for wafer handling

A method for automatically calibrating the position of a wafer handling robot relative to a wafer carrier. The method comprises providing a semiconductor processing assembly comprising the wafer carrier and the wafer handling robot having an end effector, placing a wafer on a wafer support surface o...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	Oosterlaken, Theodorus G. M
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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