Movable work piece carrier device for holding work pieces to be treated

Work piece carrier device to be installed in a vacuum chamber of a vacuum treatment system, comprising:one carousel X with a diameter dX,one or multiple carousels Ym with a diameter dYm

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Bibliographische Detailangaben
Hauptverfasser:	Gwehenberger, Jürgen, Krassnitzer, Siegfried
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	Work piece carrier device to be installed in a vacuum chamber of a vacuum treatment system, comprising:one carousel X with a diameter dX,one or multiple carousels Ym with a diameter dYm