Post-chemical mechanical polishing brush cleaning box

Embodiments provided herein include a system and method for cleaning a first surface of a substrate using a brush carousel assembly. In one embodiment, the brush carousel assembly includes one or more rotatable brush mounting assemblies coupled to a rotatable carriage, having a carriage support stru...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	Lam, Gary Ka Ho
Format:	Patent
Sprache:	eng
Schlagworte:	BRUSHES BRUSHWARE DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING HUMAN NECESSITIES MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING TRANSPORTING
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