Metal-insulator-metal (MIM) capacitor module including a cup-shaped structure with a rounded corner region

A metal-insulator-metal (MIM) capacitor includes a bottom electrode cup, an insulator, and a top electrode. The bottom electrode cup includes a laterally-extending bottom electrode cup base and a bottom electrode cup sidewall extending upwardly from the laterally-extending bottom electrode cup base....

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Bibliographische Detailangaben
1. Verfasser: Leng, Yaojian
Format: Patent
Sprache:eng
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