Dual micro-electro mechanical system and manufacturing method thereof
A micro electro mechanical system (MEMS) includes a circuit substrate, a first MEMS structure disposed over the circuit substrate, and a second MEMS structure disposed over the first MEMS structure.
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| creator | Tseng, Huang-Wen Chen, Yang-Che Teng, Yi-Chuan Lin, Chen-Hua Liang, Victor Chiang Liu, Chwen-Ming |
| description | A micro electro mechanical system (MEMS) includes a circuit substrate, a first MEMS structure disposed over the circuit substrate, and a second MEMS structure disposed over the first MEMS structure. |
| format | Patent |
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| language | eng |
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| subjects | MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TRANSPORTING |
| title | Dual micro-electro mechanical system and manufacturing method thereof |
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