Micromechanical component for a rotation rate sensor and corresponding manufacturing method
A micromechanical component for a rotation rate sensor. The micromechanical component includes two rotor masses, mirror symmetrical with respect to a first plane of symmetry aligned perpendicularly to a substrate surface and passing through the center of the two rotor masses, which may be set in rot...
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| creator | Geiger, Wolfram Markisch, Steffen Kuhlmann, Nils Felix Kuehnel, Matthias Balslink, Thorsten Maul, Robert Scheben, Rolf |
| description | A micromechanical component for a rotation rate sensor. The micromechanical component includes two rotor masses, mirror symmetrical with respect to a first plane of symmetry aligned perpendicularly to a substrate surface and passing through the center of the two rotor masses, which may be set in rotational vibrating motion about rotational axes aligned perpendicularly to the substrate surface, and four seismic masses, mirror symmetrical with respect to the first plane of symmetry, deflectable in parallel to the first plane of symmetry using the two rotor masses set in their respective rotational vibrating motion. The first rotor mass and a first pair of the four seismic masses connected thereto are mirror symmetrical to the second rotor mass and to a second pair of the four seismic masses connected thereto with respect to a second plane of symmetry aligned perpendicularly to the substrate surface and to the first plane of symmetry. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US11988511B2</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US11988511B2</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US11988511B23</originalsourceid><addsrcrecordid>eNqNyzEOwjAMBdAuDAi4gzkAQ0BIZQWBWJiAiaGyEreN1NiV496fgDgA09f_en9evW7RqyTyPXL0OICXNAoTG7SigKBiaFEYFI0gE-fPzKFAVcrFhsgdJOSpRW-TfhtZL2FZzVocMq1-uajWl_PjdN3QKE25oicma5535w51vXfuuN39Y97kODyP</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Micromechanical component for a rotation rate sensor and corresponding manufacturing method</title><source>esp@cenet</source><creator>Geiger, Wolfram ; Markisch, Steffen ; Kuhlmann, Nils Felix ; Kuehnel, Matthias ; Balslink, Thorsten ; Maul, Robert ; Scheben, Rolf</creator><creatorcontrib>Geiger, Wolfram ; Markisch, Steffen ; Kuhlmann, Nils Felix ; Kuehnel, Matthias ; Balslink, Thorsten ; Maul, Robert ; Scheben, Rolf</creatorcontrib><description>A micromechanical component for a rotation rate sensor. The micromechanical component includes two rotor masses, mirror symmetrical with respect to a first plane of symmetry aligned perpendicularly to a substrate surface and passing through the center of the two rotor masses, which may be set in rotational vibrating motion about rotational axes aligned perpendicularly to the substrate surface, and four seismic masses, mirror symmetrical with respect to the first plane of symmetry, deflectable in parallel to the first plane of symmetry using the two rotor masses set in their respective rotational vibrating motion. The first rotor mass and a first pair of the four seismic masses connected thereto are mirror symmetrical to the second rotor mass and to a second pair of the four seismic masses connected thereto with respect to a second plane of symmetry aligned perpendicularly to the substrate surface and to the first plane of symmetry.</description><language>eng</language><subject>GYROSCOPIC INSTRUMENTS ; MEASURING ; MEASURING DISTANCES, LEVELS OR BEARINGS ; NAVIGATION ; PHOTOGRAMMETRY OR VIDEOGRAMMETRY ; PHYSICS ; SURVEYING ; TESTING</subject><creationdate>2024</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240521&DB=EPODOC&CC=US&NR=11988511B2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240521&DB=EPODOC&CC=US&NR=11988511B2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Geiger, Wolfram</creatorcontrib><creatorcontrib>Markisch, Steffen</creatorcontrib><creatorcontrib>Kuhlmann, Nils Felix</creatorcontrib><creatorcontrib>Kuehnel, Matthias</creatorcontrib><creatorcontrib>Balslink, Thorsten</creatorcontrib><creatorcontrib>Maul, Robert</creatorcontrib><creatorcontrib>Scheben, Rolf</creatorcontrib><title>Micromechanical component for a rotation rate sensor and corresponding manufacturing method</title><description>A micromechanical component for a rotation rate sensor. The micromechanical component includes two rotor masses, mirror symmetrical with respect to a first plane of symmetry aligned perpendicularly to a substrate surface and passing through the center of the two rotor masses, which may be set in rotational vibrating motion about rotational axes aligned perpendicularly to the substrate surface, and four seismic masses, mirror symmetrical with respect to the first plane of symmetry, deflectable in parallel to the first plane of symmetry using the two rotor masses set in their respective rotational vibrating motion. The first rotor mass and a first pair of the four seismic masses connected thereto are mirror symmetrical to the second rotor mass and to a second pair of the four seismic masses connected thereto with respect to a second plane of symmetry aligned perpendicularly to the substrate surface and to the first plane of symmetry.</description><subject>GYROSCOPIC INSTRUMENTS</subject><subject>MEASURING</subject><subject>MEASURING DISTANCES, LEVELS OR BEARINGS</subject><subject>NAVIGATION</subject><subject>PHOTOGRAMMETRY OR VIDEOGRAMMETRY</subject><subject>PHYSICS</subject><subject>SURVEYING</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2024</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNyzEOwjAMBdAuDAi4gzkAQ0BIZQWBWJiAiaGyEreN1NiV496fgDgA09f_en9evW7RqyTyPXL0OICXNAoTG7SigKBiaFEYFI0gE-fPzKFAVcrFhsgdJOSpRW-TfhtZL2FZzVocMq1-uajWl_PjdN3QKE25oicma5535w51vXfuuN39Y97kODyP</recordid><startdate>20240521</startdate><enddate>20240521</enddate><creator>Geiger, Wolfram</creator><creator>Markisch, Steffen</creator><creator>Kuhlmann, Nils Felix</creator><creator>Kuehnel, Matthias</creator><creator>Balslink, Thorsten</creator><creator>Maul, Robert</creator><creator>Scheben, Rolf</creator><scope>EVB</scope></search><sort><creationdate>20240521</creationdate><title>Micromechanical component for a rotation rate sensor and corresponding manufacturing method</title><author>Geiger, Wolfram ; Markisch, Steffen ; Kuhlmann, Nils Felix ; Kuehnel, Matthias ; Balslink, Thorsten ; Maul, Robert ; Scheben, Rolf</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US11988511B23</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2024</creationdate><topic>GYROSCOPIC INSTRUMENTS</topic><topic>MEASURING</topic><topic>MEASURING DISTANCES, LEVELS OR BEARINGS</topic><topic>NAVIGATION</topic><topic>PHOTOGRAMMETRY OR VIDEOGRAMMETRY</topic><topic>PHYSICS</topic><topic>SURVEYING</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>Geiger, Wolfram</creatorcontrib><creatorcontrib>Markisch, Steffen</creatorcontrib><creatorcontrib>Kuhlmann, Nils Felix</creatorcontrib><creatorcontrib>Kuehnel, Matthias</creatorcontrib><creatorcontrib>Balslink, Thorsten</creatorcontrib><creatorcontrib>Maul, Robert</creatorcontrib><creatorcontrib>Scheben, Rolf</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Geiger, Wolfram</au><au>Markisch, Steffen</au><au>Kuhlmann, Nils Felix</au><au>Kuehnel, Matthias</au><au>Balslink, Thorsten</au><au>Maul, Robert</au><au>Scheben, Rolf</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Micromechanical component for a rotation rate sensor and corresponding manufacturing method</title><date>2024-05-21</date><risdate>2024</risdate><abstract>A micromechanical component for a rotation rate sensor. The micromechanical component includes two rotor masses, mirror symmetrical with respect to a first plane of symmetry aligned perpendicularly to a substrate surface and passing through the center of the two rotor masses, which may be set in rotational vibrating motion about rotational axes aligned perpendicularly to the substrate surface, and four seismic masses, mirror symmetrical with respect to the first plane of symmetry, deflectable in parallel to the first plane of symmetry using the two rotor masses set in their respective rotational vibrating motion. The first rotor mass and a first pair of the four seismic masses connected thereto are mirror symmetrical to the second rotor mass and to a second pair of the four seismic masses connected thereto with respect to a second plane of symmetry aligned perpendicularly to the substrate surface and to the first plane of symmetry.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | GYROSCOPIC INSTRUMENTS MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS NAVIGATION PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS SURVEYING TESTING |
| title | Micromechanical component for a rotation rate sensor and corresponding manufacturing method |
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