Semiconductor devices and data storage systems including the same

A semiconductor device includes a first substrate; devices on the first substrate; a second substrate on the devices; gate electrodes stacked on the second substrate and spaced apart from each other in a first direction; channel structures penetrating the gate electrodes, extending in the first dire...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Lim, Geunwon, Shin, Jaehoon, Kim, Kangmin, Eun, Dongseog
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY
Online-Zugang:	Volltext bestellen
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