Protective sealant for chalcogenide material and methods for forming the same

Protective sealant for chalcogenide material and methods for forming the same

Techniques are described to form a liner to protect a material, such as a storage element material, from damage during subsequent operations or phases of a manufacturing process. The liner may be bonded to the material (e.g., a chalcogenide material) using a strong bond or a weak bond. In some cases...

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Hauptverfasser: Grubbs, Robert K, Good, Farrell M, Lugani, Gurpreet S
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Sprache:eng
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ELECTRICITY
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creator Grubbs, Robert K
Good, Farrell M
Lugani, Gurpreet S
description Techniques are described to form a liner to protect a material, such as a storage element material, from damage during subsequent operations or phases of a manufacturing process. The liner may be bonded to the material (e.g., a chalcogenide material) using a strong bond or a weak bond. In some cases, a sealant material may be deposited during an etching phase of the manufacturing process to prevent subsequent etching operations from damaging a material that has just been etched.
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title Protective sealant for chalcogenide material and methods for forming the same
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