Semiconductor device and data storage system including the same

A semiconductor includes a lower structure and a stack structure having interlayer insulating layers and horizontal layers alternately stacked on the lower structure. A first dam vertical structure penetrates the stack structure. The first dam vertical structure divides the stack structure into a ga...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Lim, Geunwon, Park, Byunggon, Kang, Minjun, Shin, Joongshik
Format: Patent
Sprache:eng
Schlagworte:
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