Force detector and force detection system with layered structure and stress generator

A force detector includes a layered structure including a first layer and a second layer. The first layer includes a detection face that receives a force to be detected and the second layer is disposed on a face opposite to the detection face. A Young's modulus of the first layer is different f...

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Bibliographische Detailangaben
1. Verfasser: Nohno, Tomohito
Format: Patent
Sprache:eng
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