Automated inspection tool

Some embodiments of the present disclosure relate to a processing tool. The tool includes a housing enclosing a processing chamber, and an input/output port configured to pass a wafer through the housing into and out of the processing chamber. A back-side macro-inspection system is arranged within t...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Lee, Chien-Fa, Chuang, Sheng-Hsiang, Weng, Wu-An, Kuo, Shou-Wen, Liu, Hsu-Shui, Lin, Chia-Han, Tsai, Ming-Chi, Soni, Surendra Kumar, Hsueh, Ya Hsun, Pai, Jiun-Rong, Tsai, Gary, Liao, Chien-Ko, Liao, Becky, Yu, Ethan, Liu, Kuo-Yi
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CALCULATING CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS COMPUTING COUNTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS PHYSICS PRINTED CIRCUITS SEMICONDUCTOR DEVICES
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