Charged particle beam system

There is provided a charged particle beam system having a computer system for controlling an acceleration voltage of a charged particle beam emitted from a charged particle source, the system including: a first diaphragm group having first and second diaphragms which are diaphragms that act on the c...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Doi, Takashi, Akimoto, Naoki, Mochizuki, Yuzuru
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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