Apparatus for irradiating a substrate

The invention relates to an apparatus (1) for irradiating a substrate (2), which apparatus comprises a platform (4), which is straight or curved in relation to the longitudinal axis (3) of the platform (4), wherein one, two, three, four, five, six, seven, eight, nine, ten or more irradiation modules...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: Ackermann, Gunther
Format: Patent
Sprache:eng
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