Probe systems including imaging devices with objective lens isolators, and related methods

Probe systems including imaging devices with objective lens isolators and related methods are disclosed herein. A probe system includes an enclosure with an enclosure volume for enclosing a substrate that includes one or more devices under test (DUTs), a testing assembly, and an imaging device. The...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Huang, Yu-Wen, Negishi, Kazuki, Gisler, Gerald Lee, Simmons, Michael E, Christenson, Eric Robert
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
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