Method for temperature compensation of a microelectromechanical sensor, and microelectromechanical sensor

A method for temperature compensation of a MEMS sensor. The method includes: in a balancing step, a temperature gradient is produced by a thermal element and a first and a second temperature are determined at a first and a second temperature measurement point, wherein a deflection of a movable struc...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Becker, Steffen, Reinmuth, Jochen, Radovic, Dusan, Jemili, Amin, Scheben, Rolf
Format:	Patent
Sprache:	eng
Schlagworte:	INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!