Multi-level RF pulse monitoring and RF pulsing parameter optimization at a manufacturing system
Methods and systems for RF pulse monitoring and RF pulsing parameter optimization at a manufacturing system are provided. A radio frequency (RF) signal is pulsed within a processing chamber in accordance with a set of process parameters. Sensor data is received from one or more sensors that indicate...
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| creator | Cantwell, Dermot Walker, Quentin Ernie Malkov, Serghei Kumar, Jatinder |
| description | Methods and systems for RF pulse monitoring and RF pulsing parameter optimization at a manufacturing system are provided. A radio frequency (RF) signal is pulsed within a processing chamber in accordance with a set of process parameters. Sensor data is received from one or more sensors that indicates a RF pulse waveform detected within the processing chamber. One or more RF signal characteristics are identified in the detected RF pulse waveform. Each identified RF signal characteristic corresponds to at least one RF signal pulse of the RF signal pulsing within the processing chamber. A determination is made, based on the identified one or more RF signal characteristics, whether the detected RF pulse waveform corresponds to the target RF pulse waveform. An indication of whether the detected RF pulse waveform corresponds to the target RF pulse waveform is provided to a client device. |
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| subjects | INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING |
| title | Multi-level RF pulse monitoring and RF pulsing parameter optimization at a manufacturing system |
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