Systems and methods of operation of capacitive radio frequency micro-electromechanical switches

Disclosed are systems and methods of operation for capacitive radio frequency micro-electromechanical switches, such as CMUT cells for use in an ultrasound system. An RFMEMS may include substrate, a first electrode connected to the substrate, a membrane and a second electrode connected to the membra...

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Bibliographische Detailangaben
Hauptverfasser:	Shulepov, Sergei, Loebl, Hans-Peter
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS DIAGNOSIS ELECTRIC SWITCHES ELECTRICITY EMERGENCY PROTECTIVE DEVICES HUMAN NECESSITIES HYGIENE IDENTIFICATION INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEDICAL OR VETERINARY SCIENCE PHYSICS RELAYS SELECTORS SURGERY TESTING
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