Wave guide filter for semiconductor imaging devices

In some embodiments, an image sensor is provided. The image sensor includes a photodetector disposed in a semiconductor substrate. A wave guide filter having a substantially planar upper surface is disposed over the photodetector. The wave guide filter includes a light filter disposed in a light fil...

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Hauptverfasser: Huang, Cheng Yu, Chou, Keng-Yu, Tseng, Chien-Hsien, Wu, Wen-Hau, Chang, Chih-Kung, Hashimoto, Kazuaki, Yu, Wen-Chien, Chang, Ting-Cheng, Chuang, Chun-Hao, Chiang, Wei-Chieh
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creator Huang, Cheng Yu
Chou, Keng-Yu
Tseng, Chien-Hsien
Wu, Wen-Hau
Chang, Chih-Kung
Hashimoto, Kazuaki
Yu, Wen-Chien
Chang, Ting-Cheng
Chuang, Chun-Hao
Chiang, Wei-Chieh
description In some embodiments, an image sensor is provided. The image sensor includes a photodetector disposed in a semiconductor substrate. A wave guide filter having a substantially planar upper surface is disposed over the photodetector. The wave guide filter includes a light filter disposed in a light filter grid structure. The light filter includes a first material that is translucent and has a first refractive index. The light filter grid structure includes a second material that is translucent and has a second refractive index less than the first refractive index.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Wave guide filter for semiconductor imaging devices
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