Nozzle standby device, liquid processing apparatus and operation method of liquid processing apparatus

A nozzle standby device configured to allow a nozzle to stand by therein includes a nozzle accommodation unit, having an inner circumferential surface formed to surround a leading end portion of the nozzle, provided with a drain opening facing a discharge opening of the nozzle; and a solvent dischar...

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Bibliographische Detailangaben
Hauptverfasser:	Kawakami, Kohei, Takayanagi, Koji, Shimmura, Satoshi, Inada, Hiroichi
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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