Semiconductor devices and methods of manufacturing thereof

A semiconductor device includes a first semiconductor fin extending along a first direction. The semiconductor device includes a second semiconductor fin also extending along the first direction. The semiconductor device includes a dielectric fin disposed between the first and second semiconductor f...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Lin, Chih-Han, Lin, Shih-Yao, Lee, Hsiao Wen
Format: Patent
Sprache:eng
Schlagworte:
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