Method for structuring a substrate

A method for structuring a substrate is specified, in particular structuring by means of selective etching in the semiconductor and IC substrate industry, in which the following steps are carried out: providing a substrate, applying a titanium seed layer, full-area coating with a photoresist layer,...

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Bibliographische Detailangaben
1. Verfasser:	Lang, Marcus Elmar
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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