Method for sealing entries in a MEMS element

A method for sealing entries in a MEMS element. The method includes: providing a functional layer having a functional region; producing a cavity underneath the functional region of the functional layer with the aid of a first entry outside of the functional region of the functional layer; sealing th...

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Bibliographische Detailangaben

Hauptverfasser:	Hermes, Christoph, Artmann, Hans, Schmollngruber, Peter, Menold, Tobias Joachim, Ametowobla, Mawuli, Weber, Heribert, Friedrich, Thomas
Format:	Patent
Sprache:	eng
Schlagworte:	MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TRANSPORTING
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