Substrate transfer device and method of operating the same

A substrate transfer device includes a manipulator, a substrate gripping hand, an actuator configured to rotate the substrate gripping hand about a roll axis, and a controller adapted to operate the manipulator to hold a substrate by a first engaging member and a second engaging member of the substr...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Matsuoka, Shogo, Fukushima, Takayuki, Kinoshita, Shinya, Okada, Hiroyuki
Format:	Patent
Sprache:	eng
Schlagworte:	CHAMBERS PROVIDED WITH MANIPULATION DEVICES HAND TOOLS MANIPULATORS PERFORMING OPERATIONS PORTABLE POWER-DRIVEN TOOLS TRANSPORTING
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