Ferroelectric field effect transistor devices and methods for forming the same

Ferroelectric structures, including a ferroelectric field effect transistors (FeFETs), and methods of making the same are disclosed which have improved ferroelectric properties and device performance. A FeFET device including a ferroelectric material gate dielectric layer and a metal oxide semicondu...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Lin, Yu-Ming, Chen, Hai-Ching, Lin, Po-Ting, Huang, Yen-Chieh, Liao, Song-Fu
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!