Channel formation for three dimensional transistors

Embodiments herein describe techniques for a transistor above a substrate. The transistor includes a channel layer above the substrate. The channel layer includes a first channel material of a first conductivity. In addition, the channel layer further includes elements of one or more additional mate...

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Bibliographische Detailangaben
Hauptverfasser: Sell, Bernhard, Ku, Chieh-Jen, Wang, Pei-Hua, Mitan, Martin M, Pipes, Leonard C
Format: Patent
Sprache:eng
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