System using pixelated faraday sensor

A system and method for optimizing a ribbon ion beam in a beam line implantation system is disclosed. The system includes a calibration sensor disposed in the beam line after the mass analyzer. The calibration sensor is able to measure both the total current of the ribbon ion beam, as well as provid...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Cucchetti, Antonella, Clay, Nevin, Layne, Philip, Hermanson, Eric D, Mahalingam, Sudhakar, Simmons, Michael
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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