Monolithic formation of a set of interconnects below active devices

An additional set of interconnects is created in bulk material, allowing connections to active devices to be made from both above and below. The interconnects below the active devices can form a power distribution network, and the interconnects above the active devices can form a signaling network....

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Liebmann, Lars, Chanemougame, Daniel, Smith, Jeffrey
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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