Vertically-shifting electrostatic actuator and optical scanner employing the same

An optical scanner includes a mirror configured to reflect an incident light and a vertically-shifting electrostatic actuator configured to oscillate the mirror. The electrostatic actuator includes a frame having an installation space in a central portion and a drive electrode, a stationary electrod...

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Bibliographische Detailangaben

Hauptverfasser:	Kim, Yong Kook, Kim, Yun Goo, Kim, Hwan Sun, Lee, Eun Joong
Format:	Patent
Sprache:	eng
Schlagworte:	MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS TRANSPORTING
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