Fluid pressure detection device

A fluid pressure detection device capable of accurately detecting a pressure change of a fluid flowing inside a tube includes a substrate, a piezoelectric element formed on the top surface of the substrate, a support body which is annular and surrounds the piezoelectric element and supports the top...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Nakano, Mutsuko, Moriki, Tomohiro, Unno, Ken
Format: Patent
Sprache:eng
Schlagworte:
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