Halogen free syntheses of aminosilanes by catalytic dehydrogenative coupling
Compounds and method of preparation of Si-X and Ge-X compounds (X═N, P, As and Sb) via dehydrogenative coupling between the corresponding unsubstituted silanes and amines (including ammonia) or phosphines catalyzed by metallic catalysts is described. This new approach is based on the catalytic dehyd...
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| creator | Sanchez, Antonio Zhang, Peng Itov, Gennadiy Khandelwal, Manish Stephens, Matthew |
| description | Compounds and method of preparation of Si-X and Ge-X compounds (X═N, P, As and Sb) via dehydrogenative coupling between the corresponding unsubstituted silanes and amines (including ammonia) or phosphines catalyzed by metallic catalysts is described. This new approach is based on the catalytic dehydrogenative coupling of a Si-H and a X-H moiety to form a Si-X containing compound and hydrogen gas (X═N, P, As and Sb). The process can be catalyzed by transition metal heterogenous catalysts such as Ru(0) on carbon, Pd(0) on MgO) as well as transition metal organometallic complexes that act as homogeneous catalysts. The -Si-X products produced by dehydrogenative coupling are inherently halogen free. Said compounds can be useful for the deposition of thin films by chemical vapor deposition or atomic layer deposition of Si-containing films. |
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This new approach is based on the catalytic dehydrogenative coupling of a Si-H and a X-H moiety to form a Si-X containing compound and hydrogen gas (X═N, P, As and Sb). The process can be catalyzed by transition metal heterogenous catalysts such as Ru(0) on carbon, Pd(0) on MgO) as well as transition metal organometallic complexes that act as homogeneous catalysts. The -Si-X products produced by dehydrogenative coupling are inherently halogen free. 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| subjects | ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM BASIC ELECTRIC ELEMENTS CHEMISTRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY METALLURGY ORGANIC CHEMISTRY SEMICONDUCTOR DEVICES |
| title | Halogen free syntheses of aminosilanes by catalytic dehydrogenative coupling |
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