Power supply signal conditioning for an electrostatic chuck

Exemplary semiconductor processing systems may include a processing chamber and an electrostatic chuck disposed at least partially within the processing chamber. The electrostatic chuck may include at least one electrode and a heater. A semiconductor processing system may include a power supply to p...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Srivastava, Shailendra, Dzilno, Dmitry A, Han, Xinhai, Ye, Zheng John, Howlader, Rana, Kamath, Sanjay G, Enslow, Kristopher R, Rocha-Alvarez, Juan Carlos, Benjamin Raj, Daemian Raj, Hammond, Edward P, Keshri, Abhigyan, Padhi, Deenesh
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!