Monolithic sensor arrangement, manufacturing method and measurement method

A monolithic sensor arrangement, a manufacturing method and a measurement method are disclosed. In an embodiment a monolithic gas sensor arrangement includes a sensor including a first transducer with a first sensitive layer and a second transducer with a second sensitive layer, and a readout circui...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Nenadovic, Nebojsa, Vanhelmont, Frederik Willem Maurits, Habibi, Hooman, Suy, Hilco
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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