Parameter sensing and computer modeling for gas delivery health monitoring

A method includes receiving measurement data from multiple sensors positioned along a delivery line that delivers a liquid as a gas to one of a gas panel or a processing chamber; simulating, using a computer-generated model, one or more process parameters associated with the delivery line and a plur...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Prabhu, Gopalakrishna B, Oh, Jeonghoon, Ramanathan, Karthik, Moradian, Ala, Zhang, Lin, Mahakali, Rohit, Kelkar, Umesh Madhav, Sheng, Shuran, L'Heureux, James Omer, Yuan, Zheng
Format:	Patent
Sprache:	eng
Schlagworte:	ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS CALCULATING COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING MEASURING MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR PHYSICS TARIFF METERING APPARATUS TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!