Peeling device and peeling method using the same

A peeling device includes a peeling tank for containing a first solution therein, a support portion on which a stack structure including a base layer extending in a first direction and a film coupled with the base layer is disposed, the support portion being disposed in the peeling tank and an adsor...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Jang, Ilsoo, Kim, Jongdae, Yang, Daeho, Lee, Sunghoon, Kim, Sunkwan
Format:	Patent
Sprache:	eng
Schlagworte:	LAYERED PRODUCTS LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM PERFORMING OPERATIONS TRANSPORTING
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