Semiconductor equipment management method, electronic device, and non-transitory computer readable storage medium

A semiconductor equipment management method applicable to an electronic device for managing multiple pieces of semiconductor equipment is provided. The pieces of semiconductor equipment are respectively controlled through multiple control hosts, and the control hosts and the electronic device are co...

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Bibliographische Detailangaben

Hauptverfasser:	Chuang, Sheng-Hsiang, Pai, Jiun-Rong, Kuo, Shou-Wen, Liao, Chien-Ko, Liu, Hsu-Shui, Li, Sing-Tsung
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING COUNTING FUNCTIONAL ELEMENTS OF SUCH SYSTEMS IMAGE DATA PROCESSING OR GENERATION, IN GENERAL MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING
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