Exhaust gas processing system including adsorbent for suppressing powder-like byproduct
An exhaust gas processing system including a process chamber in which an exhaust gas is produced; an exhaust gas measurer receiving the exhaust gas and measuring a concentration of the exhaust gas; a solid producing gas processor receiving the exhaust gas and removing a solid producing gas contained...
Gespeichert in:
| Hauptverfasser: | , , , , , , , , |
|---|---|
| Format: | Patent |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | |
| container_start_page | |
| container_title | |
| container_volume | |
| creator | Lee, Jihnkoo Gim, Suji Yook, Sunwoo Hwang, Jongha Roh, Youngseok Ko, Youngduk Bae, Jongyong Maeng, Seoyoung Pyeon, Jungjoon |
| description | An exhaust gas processing system including a process chamber in which an exhaust gas is produced; an exhaust gas measurer receiving the exhaust gas and measuring a concentration of the exhaust gas; a solid producing gas processor receiving the exhaust gas and removing a solid producing gas contained in the exhaust gas; a gas supply supplying dilution and cooling gases to the solid producing gas processor; a processed gas measurer receiving, as a processed gas, the exhaust gas free of the solid producing gas and measuring a temperature of the processed gas and ingredients of the processed gas; and a controller receiving results of measurement of the concentration of the exhaust gas from the exhaust gas measurer and results of measurement of the temperature of the processed gas and the ingredients of the processed gas from the exhaust gas measurer and controlling the gas supply based on the measurement results. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US11738299B2</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US11738299B2</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US11738299B23</originalsourceid><addsrcrecordid>eNqNjEEOgjAQAHvxYNQ_LA_gAByUqwTjXY1HUtoFGmu76bZRfq8mPMDTJJPJrMW9fU8ycYRRMlDwCpmNG4FnjvgE45RN-iekZh96dBEGH4ATUVhS8i-NIbfmgdDP34dOKm7FapCWcbdwI7JTe23OOZLvkEkqdBi726Uo9tWhrOtjWf3TfAAAUjtp</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Exhaust gas processing system including adsorbent for suppressing powder-like byproduct</title><source>esp@cenet</source><creator>Lee, Jihnkoo ; Gim, Suji ; Yook, Sunwoo ; Hwang, Jongha ; Roh, Youngseok ; Ko, Youngduk ; Bae, Jongyong ; Maeng, Seoyoung ; Pyeon, Jungjoon</creator><creatorcontrib>Lee, Jihnkoo ; Gim, Suji ; Yook, Sunwoo ; Hwang, Jongha ; Roh, Youngseok ; Ko, Youngduk ; Bae, Jongyong ; Maeng, Seoyoung ; Pyeon, Jungjoon</creatorcontrib><description>An exhaust gas processing system including a process chamber in which an exhaust gas is produced; an exhaust gas measurer receiving the exhaust gas and measuring a concentration of the exhaust gas; a solid producing gas processor receiving the exhaust gas and removing a solid producing gas contained in the exhaust gas; a gas supply supplying dilution and cooling gases to the solid producing gas processor; a processed gas measurer receiving, as a processed gas, the exhaust gas free of the solid producing gas and measuring a temperature of the processed gas and ingredients of the processed gas; and a controller receiving results of measurement of the concentration of the exhaust gas from the exhaust gas measurer and results of measurement of the temperature of the processed gas and the ingredients of the processed gas from the exhaust gas measurer and controlling the gas supply based on the measurement results.</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; PERFORMING OPERATIONS ; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL ; SEMICONDUCTOR DEVICES ; SEPARATION ; TRANSPORTING</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230829&DB=EPODOC&CC=US&NR=11738299B2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,309,781,886,25569,76552</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230829&DB=EPODOC&CC=US&NR=11738299B2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Lee, Jihnkoo</creatorcontrib><creatorcontrib>Gim, Suji</creatorcontrib><creatorcontrib>Yook, Sunwoo</creatorcontrib><creatorcontrib>Hwang, Jongha</creatorcontrib><creatorcontrib>Roh, Youngseok</creatorcontrib><creatorcontrib>Ko, Youngduk</creatorcontrib><creatorcontrib>Bae, Jongyong</creatorcontrib><creatorcontrib>Maeng, Seoyoung</creatorcontrib><creatorcontrib>Pyeon, Jungjoon</creatorcontrib><title>Exhaust gas processing system including adsorbent for suppressing powder-like byproduct</title><description>An exhaust gas processing system including a process chamber in which an exhaust gas is produced; an exhaust gas measurer receiving the exhaust gas and measuring a concentration of the exhaust gas; a solid producing gas processor receiving the exhaust gas and removing a solid producing gas contained in the exhaust gas; a gas supply supplying dilution and cooling gases to the solid producing gas processor; a processed gas measurer receiving, as a processed gas, the exhaust gas free of the solid producing gas and measuring a temperature of the processed gas and ingredients of the processed gas; and a controller receiving results of measurement of the concentration of the exhaust gas from the exhaust gas measurer and results of measurement of the temperature of the processed gas and the ingredients of the processed gas from the exhaust gas measurer and controlling the gas supply based on the measurement results.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>PERFORMING OPERATIONS</subject><subject>PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>SEPARATION</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2023</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNjEEOgjAQAHvxYNQ_LA_gAByUqwTjXY1HUtoFGmu76bZRfq8mPMDTJJPJrMW9fU8ycYRRMlDwCpmNG4FnjvgE45RN-iekZh96dBEGH4ATUVhS8i-NIbfmgdDP34dOKm7FapCWcbdwI7JTe23OOZLvkEkqdBi726Uo9tWhrOtjWf3TfAAAUjtp</recordid><startdate>20230829</startdate><enddate>20230829</enddate><creator>Lee, Jihnkoo</creator><creator>Gim, Suji</creator><creator>Yook, Sunwoo</creator><creator>Hwang, Jongha</creator><creator>Roh, Youngseok</creator><creator>Ko, Youngduk</creator><creator>Bae, Jongyong</creator><creator>Maeng, Seoyoung</creator><creator>Pyeon, Jungjoon</creator><scope>EVB</scope></search><sort><creationdate>20230829</creationdate><title>Exhaust gas processing system including adsorbent for suppressing powder-like byproduct</title><author>Lee, Jihnkoo ; Gim, Suji ; Yook, Sunwoo ; Hwang, Jongha ; Roh, Youngseok ; Ko, Youngduk ; Bae, Jongyong ; Maeng, Seoyoung ; Pyeon, Jungjoon</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US11738299B23</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2023</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>PERFORMING OPERATIONS</topic><topic>PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>SEPARATION</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>Lee, Jihnkoo</creatorcontrib><creatorcontrib>Gim, Suji</creatorcontrib><creatorcontrib>Yook, Sunwoo</creatorcontrib><creatorcontrib>Hwang, Jongha</creatorcontrib><creatorcontrib>Roh, Youngseok</creatorcontrib><creatorcontrib>Ko, Youngduk</creatorcontrib><creatorcontrib>Bae, Jongyong</creatorcontrib><creatorcontrib>Maeng, Seoyoung</creatorcontrib><creatorcontrib>Pyeon, Jungjoon</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Lee, Jihnkoo</au><au>Gim, Suji</au><au>Yook, Sunwoo</au><au>Hwang, Jongha</au><au>Roh, Youngseok</au><au>Ko, Youngduk</au><au>Bae, Jongyong</au><au>Maeng, Seoyoung</au><au>Pyeon, Jungjoon</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Exhaust gas processing system including adsorbent for suppressing powder-like byproduct</title><date>2023-08-29</date><risdate>2023</risdate><abstract>An exhaust gas processing system including a process chamber in which an exhaust gas is produced; an exhaust gas measurer receiving the exhaust gas and measuring a concentration of the exhaust gas; a solid producing gas processor receiving the exhaust gas and removing a solid producing gas contained in the exhaust gas; a gas supply supplying dilution and cooling gases to the solid producing gas processor; a processed gas measurer receiving, as a processed gas, the exhaust gas free of the solid producing gas and measuring a temperature of the processed gas and ingredients of the processed gas; and a controller receiving results of measurement of the concentration of the exhaust gas from the exhaust gas measurer and results of measurement of the temperature of the processed gas and the ingredients of the processed gas from the exhaust gas measurer and controlling the gas supply based on the measurement results.</abstract><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | |
| ispartof | |
| issn | |
| language | eng |
| recordid | cdi_epo_espacenet_US11738299B2 |
| source | esp@cenet |
| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEMICONDUCTOR DEVICES SEPARATION TRANSPORTING |
| title | Exhaust gas processing system including adsorbent for suppressing powder-like byproduct |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-15T00%3A43%3A25IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=Lee,%20Jihnkoo&rft.date=2023-08-29&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS11738299B2%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |