Heterojunction material and method of preparing the same

Heterojunction material and method of preparing the same

A method of preparing a heterojunction material, includes forming a first transition metal on a substrate, forming a second transition metal on the first transition metal, and performing a plasma process containing a chalcogen source on the substrate. The first transition metal and the second transi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Kim, Taesung, Kim, Hyeong U, Seok, Hyunho, Cho, Jinill, Kaluram, Kanade Chaitanya
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A method of preparing a heterojunction material, includes forming a first transition metal on a substrate, forming a second transition metal on the first transition metal, and performing a plasma process containing a chalcogen source on the substrate. The first transition metal and the second transition metal are different from each other.