Cantilever, scanning probe microscope, and measurement method using scanning probe microscope

To enhance the measurement sensitivity of a scanning probe microscope. In a cross sectional view, a cantilever includes a vertex portion that is a portion close to a sample and is covered by a metallic film, a ridge that is connected to the vertex portion and is covered by the metallic film, and an...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Hirose, Takenori, Zhang, Kaifeng, Saeki, Tomonori
Format:	Patent
Sprache:	eng
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] MEASURING PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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