Semiconductor device

A semiconductor device including a device isolation layer defining an active region; a first trench in the device isolation layer; a second trench in the active region; a main gate electrode structure filling a portion of the first trench and including a first barrier conductive layer and a main gat...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Choi, Woo Young, Hwang, Yoo Sang, Han, Sang-Il, Kim, Kyu Jin, Kim, Hui-Jung, Lee, Kyu Hyun
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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