Memory device, memory system having the same, and write method thereof

A memory device includes: a first wafer including a first substrate, a plurality of first electrode layers and a plurality of first interlayer dielectric layers alternately stacked along first vertical channels projecting in a vertical direction on a top surface of the first substrate, and a dielect...

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Hauptverfasser: Oh, Sung Lae, Park, Sang Woo, Chae, Dong Hyuk, Kim, Ki Soo
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creator Oh, Sung Lae
Park, Sang Woo
Chae, Dong Hyuk
Kim, Ki Soo
description A memory device includes: a first wafer including a first substrate, a plurality of first electrode layers and a plurality of first interlayer dielectric layers alternately stacked along first vertical channels projecting in a vertical direction on a top surface of the first substrate, and a dielectric stack comprising a plurality of dielectric layers and the plurality of first interlayer dielectric layers alternately stacked on the top surface of the first substrate; and a second wafer disposed on the first wafer, and including a second substrate, and a plurality of second electrode layers that are alternately stacked with a plurality of second interlayer dielectric layers along second vertical channels projecting in the vertical direction on a bottom surface of the second substrate and have pad parts overlapping with the dielectric stack in the vertical direction.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INFORMATION STORAGE
PHYSICS
SEMICONDUCTOR DEVICES
STATIC STORES
title Memory device, memory system having the same, and write method thereof
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