Method for producing a substrate

A method includes forming a first electrically conductive layer on a first side of a dielectric insulation layer, forming a structured mask layer on a side of the first electrically conductive layer that faces away from the dielectric insulation layer, forming at least one trench in the first electr...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Craes, Fabian, Ehlers, Carsten, Wilke, Ulrich, Hohlfeld, Olaf
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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