Surface inspection apparatus, non-transitory computer readable medium storing program, and surface inspection method

The disclosure provides a surface inspection apparatus for inspecting a surface of an object, a non-transitory computer readable medium thereof, and a surface inspection method thereof. According to an aspect of the disclosure, the surface inspection apparatus includes an imaging device configured t...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Aikawa, Kiyofumi, Ichikawa, Hirokazu, Hiramatsu, Takashi, Uno, Miho, Onuki, Hiroko, Tasaki, Kaito, Kuwada, Yoshitaka
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY IMAGE DATA PROCESSING OR GENERATION, IN GENERAL PHYSICS PICTORIAL COMMUNICATION, e.g. TELEVISION
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