Bulk-acoustic wave resonator

Bulk-acoustic wave resonator

A bulk-acoustic wave resonator comprises a substrate, a resonant portion comprising a first electrode, a piezoelectric layer, and a second electrode sequentially stacked on the substrate, and further comprising a center portion and an extension portion that is disposed along a periphery of the cente...

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Hauptverfasser: Son, Jin Suk, Lee, Hwa Sun, Shin, Ran Hee, Lee, Tae Kyung, Kim, Sung Sun, Kyoung, Je Hong
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
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creator Son, Jin Suk
Lee, Hwa Sun
Shin, Ran Hee
Lee, Tae Kyung
Kim, Sung Sun
Kyoung, Je Hong
description A bulk-acoustic wave resonator comprises a substrate, a resonant portion comprising a first electrode, a piezoelectric layer, and a second electrode sequentially stacked on the substrate, and further comprising a center portion and an extension portion that is disposed along a periphery of the center portion, and an insertion layer that is disposed in the extension portion between the first electrode and the piezoelectric layer, and the insertion layer is formed of an aluminum alloy containing scandium (Sc).
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subjects BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
title Bulk-acoustic wave resonator
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