Optical waveguide device

An optical waveguide device includes a substrate on which an intermediate layer, a thin-film LN layer of lithium niobate, and a buffer layer are stacked; an optical waveguide formed in the thin-film LN layer; and a plurality of electrodes near the optical waveguide. The intermediate layer and the bu...

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Bibliographische Detailangaben
Hauptverfasser: Doi, Masaharu, Kurahashi, Teruo, Kubota, Yoshinobu, Makino, Shuntaro, Ohmori, Yasuhiro, Takeuchi, Shintaro
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An optical waveguide device includes a substrate on which an intermediate layer, a thin-film LN layer of lithium niobate, and a buffer layer are stacked; an optical waveguide formed in the thin-film LN layer; and a plurality of electrodes near the optical waveguide. The intermediate layer and the buffer layer contain a same material of a metal element of any one of group 3 of group 18 of a periodic table of elements.